MEMS mass gas flow technology
Wide range from 5 to 500SLM
Analog or Digital output optional
Unidirectional and bidirectional flow
Low working voltage optional
Fast Response
High sensitivity&accuracy

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The XGZF4000 series measures the flow of gases in flow channels according to the thermodynamic principle and is capable of measuring non-corrosive gases such as air, oxygen and nitrogen with high accuracy. The built-in MEMS thermal sensor chip and high performance CMOS microprocessor, combined with a unique calibration program, can output real-time accurate flow signals.

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