MEMS-thermische Massenstrommessung
Messbereich: 5 bis 500 SLM
Analog- oder Digitalausgang
Uni- oder bidirektionale Messung
Schnelle Reaktionszeit, hohe Empfindlichkeit
Zuverlässige und stabile Leistung
MEMS-thermische Massenstrommessung
Messbereich: 100 bis 3000 SCCM
Analog- oder Digitalausgang
Uni- oder bidirektionale Messung
Schnelle Reaktion, hohe Empfindlichkeit
Zuverlässige und stabile Leistung
Standard I2C interface
High-precision digital sensor
Temperature calibrated
Without peripheral circuits
MEMS thermopile technology
A 5.5 μ m long-pass filter
TO-46 metal tube shell package
-100kPa…-0.5～0～0.5…700kPa
Differential Pressure Type
For Non-corrosive Gas or Air
Optional 5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃～60℃
-100kPa…-0.5～0～0.5…700kPa
2.5V～5.5V Power Supply
Differential Pressure Type
For Non-corrosive Gas or Air
Calibrated Digital Signal(I2C Interface)
Temp. Compensated: 0℃～60℃
Temperature Measurable
-100kPa…-0.5～0～0.5…200kPa
2.5V～5.5V Power Supply
Differential Pressure Type
For Non-corrosive Gas or Air
Calibrated Digital Signal(I2C Interface)
Temp. Compensated: 0℃～60℃
Temperature Measurable
-100kPa…-0.5～0～0.5…200kPa
Differential Pressure Type
For Non-corrosive Gas or Air
Optional 5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃～60℃
-100kPa…-0.5～0～0.5…700kPa
2.5V～5.5V Power Supply
Differential Pressure Type
For Non-corrosive Gas or Air
Calibrated Digital Signal(I2C Interface)
Temp. Compensated: 0℃～60℃
Temperature Measurable
-100kPa～0～2.5…700kPa
Differential Pressure Type
For Non-corrosive Gas or Air or Liquid
5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃～60℃
-10kPa…-0.5～0～0.5…10kPa
Differential Pressure Type
For Dry Non-corrosive Gas or Air
Optional 5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃～60℃
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