MEMS mass gas flow technology
Wide range from 5 to 500SLM
Analog or Digital output optional
Unidirectional and bidirectional flow
Low working voltage optional
Fast Response
High sensitivity&accuracy
MEMS mass gas flow technology
Wide range from 100 to 3000SCCM
Analog or Digital output optional
Unidirectional and bidirectional flow optional
Low working voltage optional
Fast Response
High sensitivity&accuracy
Standard I2C interface
High-precision digital sensor
Temperature calibrated
Without peripheral circuits
MEMS thermopile technology
A 5.5 μ m long-pass filter
TO-46 metal tube shell package
-100kPa…-0.5~0~0.5…700kPa
Differential Pressure Type
For Non-corrosive Gas or Air
Optional 5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃~60℃
-100kPa…-0.5~0~0.5…700kPa
2.5V~5.5V Power Supply
Differential Pressure Type
For Non-corrosive Gas or Air
Calibrated Digital Signal(I2C Interface)
Temp. Compensated: 0℃~60℃
Temperature Measurable
-100kPa…-0.5~0~0.5…200kPa
2.5V~5.5V Power Supply
Differential Pressure Type
For Non-corrosive Gas or Air
Calibrated Digital Signal(I2C Interface)
Temp. Compensated: 0℃~60℃
Temperature Measurable
-100kPa…-0.5~0~0.5…200kPa
Differential Pressure Type
For Non-corrosive Gas or Air
Optional 5V and 3.3V Voltage
Calibrated Amplified Analog Signal
Temp. Compensated: 0℃~60℃